Ellipsometry platform : new ellipsometer Forbach site
The Smart SE from HORIBA Scientific is a versatile spectroscopic ellipsometer for fast, accurate thin-film measurements. It characterizes the thickness of thin films from a few angstroms to 20 µm, optical constants (n, k) and structural properties of thin films (such as roughness, optically graded and anisotropic layers, etc.). The spectral range from 450 to 1000 nm is measured in a few seconds, and the ellipsometric data are analyzed using the DeltaPsi2 software platform. The software integrates two levels to perform both routine analysis with predefined recipes and advanced analysis with state-of-the-art ellipsometric modeling. The Smart SE ellipsometer is a no-compromise tool for thin-film R&D, offering research-grade performance. It provides an integrated vision system for precise spot positioning, seven automated micro-spots down to tens of microns in size for measurement of small features, and the ability to measure the full 16-element Mueller matrix just few seconds for study of complex samples.
